Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Chorng-Haur Sow Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chorng-Haur Sow returned 1 record(s).

NumberTitle
1Enhanced electron field emission properties of high aspect ratio silicon nanowire-zinc oxide core-shell arrays