Yi-He Tsai Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yi-He Tsai returned 3 record(s).

Number	Title
1	Integration of microwave-annealed oxidation on germanium metal-oxide-semiconductor devices
2	Improving Thermal Stability and Interface State Density of High-k Stacks by Incorporating Hf into an Interfacial Layer on p-Germanium
3	Incorporating Yttrium into a GeO Interfacial Layer with HfO2-Based Gate Stack on Ge