Inductively coupled plasma sources from Plasma ALD, LLC.


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Toyohiro Chikyo Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Toyohiro Chikyo returned 1 record(s).

NumberTitle
1Role of the (Ta/Nb)Ox/Al2O3 interface on the flatband voltage shift for Al2O3/(Ta/Nb)Ox/Al2O3 multilayer charge trap capacitors