Inductively coupled plasma sources from Plasma ALD, LLC.


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Vijay Narayanan Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Vijay Narayanan returned 2 record(s).

NumberTitle
1The physical properties of cubic plasma-enhanced atomic layer deposition TaN films
2Oxygen migration in TiO2-based higher-k gate stacks