Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Christine Martinet Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Christine Martinet returned 1 record(s).

NumberTitle
1PEALD ZrO2 Films Deposition on TiN and Si Substrates