Inductively coupled plasma sources from Plasma ALD, LLC.


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Chenhui Zhu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chenhui Zhu returned 2 record(s).

NumberTitle
1A multifunctional biphasic water splitting catalyst tailored for integration with high-performance semiconductor photoanodes
2High Performance CoOx/Si Photoanodes: Accessing Structural Disorder for Improved Catalytic Activity via Atomic Layer Deposition