Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Kwang-Man Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kwang-Man Lee returned 2 record(s).

NumberTitle
1Interface Properties of Nickel-silicide Films Deposited by Using Plasma-assisted Atomic Layer Deposition
2Characteristics of SiOC(-H) Thin Films Prepared by Using Plasma-enhanced Atomic Layer Deposition