Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Tza-Jing Gung Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Tza-Jing Gung returned 1 record(s).

NumberTitle
1Plasma Enhanced Atomic Layer Deposition of TaN Films for Advanced Interconnects