Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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R. S. Salunke Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by R. S. Salunke returned 1 record(s).

NumberTitle
1PEALD grown high-k ZrO2 thin films on SiC group IV compound semiconductor