Inductively coupled plasma sources from Plasma ALD, LLC.


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Pungkeun Song Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Pungkeun Song returned 1 record(s).

NumberTitle
1Barrier Characteristics of ZrN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Using Tetrakis(diethylamino)zirconium Precursor