Inductively coupled plasma sources from Plasma ALD, LLC.


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Il-Hyuk Yoo Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Il-Hyuk Yoo returned 1 record(s).

NumberTitle
1Highly Uniform, Electroforming-Free, and Self-Rectifying Resistive Memory in the Pt/Ta2O5/HfO2-x/TiN Structure