Baoshun Zhang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Baoshun Zhang returned 3 record(s).

Number	Title
1	Compatibility of AlN/SiNx Passivation With LPCVD-SiNx Gate Dielectric in GaN-Based MIS-HEMT
2	Annealing effects on properties of Ga2O3 films deposited by plasma-enhanced atomic layer deposition
3	Compatibility of AlN/SiNx Passivation Technique with High-Temperature Process