Inductively coupled plasma sources from Plasma ALD, LLC.


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Yung-Sheng Fang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yung-Sheng Fang returned 1 record(s).

NumberTitle
1AlN Surface Passivation of GaN-Based High Electron Mobility Transistors by Plasma-Enhanced Atomic Layer Deposition