Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Wei-Chun Chi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Wei-Chun Chi returned 1 record(s).

NumberTitle
1Integration of microwave-annealed oxidation on germanium metal-oxide-semiconductor devices