Kuei-Wen Huang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kuei-Wen Huang returned 3 record(s).

Number	Title
1	Effective work function modulation of the bilayer metal gate stacks by the Hf-doped thin TiN interlayer prepared by the in-situ atomic layer doping technique
2	Sub-nanometer heating depth of atomic layer annealing
3	Sub-7-nm textured ZrO₂ with giant ferroelectricity