Inductively coupled plasma sources from Plasma ALD, LLC.


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Moon-Sang Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Moon-Sang Lee returned 2 record(s).

NumberTitle
1Formation of Ru nanocrystals by plasma enhanced atomic layer deposition for nonvolatile memory applications
2Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application