Inductively coupled plasma sources from Plasma ALD, LLC.


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Ravi S. Sundaram Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ravi S. Sundaram returned 2 record(s).

NumberTitle
1Plasma-Enhanced Atomic Layer Deposition of Al2O3 on Graphene Using Monolayer hBN as Interfacial Layer
2Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology