Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Saptarshi Mandal Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Saptarshi Mandal returned 1 record(s).

NumberTitle
1Al2O3 Insertion Layer for Improved PEALD SiO2/(Al)GaN Interfaces