Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Peter Kus Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peter Kus returned 1 record(s).

NumberTitle
1Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources