Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Chia Chi Chang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chia Chi Chang returned 1 record(s).

NumberTitle
1In0.53Ga0.47As FinFET and GAA-FET With Remote-Plasma Treatment