Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

André Dathe Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by André Dathe returned 1 record(s).

NumberTitle
1Electrically Excited Plasmonic Nanoruler for Biomolecule Detection