Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Jeong Soo Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jeong Soo Park returned 1 record(s).

NumberTitle
1Temperature control for the gate workfunction engineering of TiC film by atomic layer deposition