Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Trevor Van Engelhoven Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Trevor Van Engelhoven returned 1 record(s).

NumberTitle
1Toward plasma enhanced atomic layer deposition of oxides on graphene: Understanding plasma effects