Inductively coupled plasma sources from Plasma ALD, LLC.


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Jun-Xiang Pei Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jun-Xiang Pei returned 1 record(s).

NumberTitle
1Growth, physical and electrical characterization of nickel oxide thin films prepared by plasma-enhanced atomic layer deposition using nickelocene and oxygen precursors