Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Wilhelm Warta Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Wilhelm Warta returned 1 record(s).

NumberTitle
1Electrical characterization of the slow boron oxygen defect component in Czochralski silicon