Matthieu J. Weber Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Matthieu J. Weber returned 4 record(s).

Number	Title
1	Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
2	Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)₂ and H₂ and O₂ Plasmas
3	In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
4	Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition