Alexander V. Larin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander V. Larin returned 2 record(s).

Number	Title
1	Detailed Atomistic Modeling of Si(110) Passivation by Atomic Layer Deposition of Al₂O₃
2	DFT modeling of plasma-assisted atomic layer deposition for Si(110) passivation: formation of boehmite-like chains as γ-Al₂O₃ precursors