Guglielmo Guido Condorelli Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Guglielmo Guido Condorelli returned 1 record(s).
| Number | Title |
|---|---|
| 1 | Effects of surface nature of different semiconductor substrates on the plasma enhanced atomic layer deposition growth of Al2O3 gate dielectric thin films |