Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Małgorzata Sowińska Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Małgorzata Sowińska returned 2 record(s).

NumberTitle
1Analysis of nitrogen species in titanium oxynitride ALD films
2Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study