Kazuhiro Ito Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kazuhiro Ito returned 2 record(s).

Number	Title
1	Role of the (Ta/Nb)O_x/Al₂O₃ interface on the flatband voltage shift for Al₂O₃/(Ta/Nb)O_x/Al₂O₃ multilayer charge trap capacitors
2	Improvement of smooth surface of RuO₂ bottom electrode on Al₂O₃ buffer layer and characteristics of RuO₂/TiO₂/Al₂O₃/TiO₂/RuO₂ capacitors