Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Karyn L. Jarvis Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Karyn L. Jarvis returned 2 record(s).

NumberTitle
1Influence of the polymeric substrate on the water permeation of alumina barrier films deposited by atomic layer deposition
2Comparisons of alumina barrier films deposited by thermal and plasma atomic layer deposition