Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Man Hoi Wong Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Man Hoi Wong returned 2 record(s).

NumberTitle
1Field-Plated Ga2O3 MOSFETs With a Breakdown Voltage of Over 750 V
2Electron channel mobility in silicon-doped Ga2O3 MOSFETs with a resistive buffer layer