Zoltán Erdélyi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Zoltán Erdélyi returned 2 record(s).

Number	Title
1	Electron irradiation induced amorphous SiO2 formation at metal oxide/Si interface at room temperature; electron beam writing on interfaces
2	Tuning the nanoscale morphology and optical properties of porous gold nanoparticles by surface passivation and annealing