Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Zoltán Erdélyi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Zoltán Erdélyi returned 2 record(s).

NumberTitle
1Electron irradiation induced amorphous SiO2 formation at metal oxide/Si interface at room temperature; electron beam writing on interfaces
2Tuning the nanoscale morphology and optical properties of porous gold nanoparticles by surface passivation and annealing