Wooho Jeong Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Wooho Jeong returned 6 record(s).

Number	Title
1	Atomic layer deposited HfO₂/HfSi_xO_yN_z stacked gate dielectrics for metal-oxide-semiconductor structures
2	The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition
3	Characteristics of HfN films deposited by using remote plasma-enhanced atomic layer deposition
4	Atomic Layer Deposition of HfO₂ Thin Films on Ultrathin SiO₂ Formed by Remote Plasma Oxidation
5	Characteristics of Atomic-Layer-Deposited HfO₂ Films by Using a Remote Plasma on Pre-Deposited Hf Metal Layer
6	Characteristics of Cobalt Thin Films Deposited by Remote Plasma ALD Method with Dicobalt Octacarbonyl