Inductively coupled plasma sources from Plasma ALD, LLC.


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Massimo Catalano Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Massimo Catalano returned 1 record(s).

NumberTitle
1High-κ Dielectric on ReS2: In-Situ Thermal Versus Plasma-Enhanced Atomic Layer Deposition of Al2O3