Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Yuanshen Qi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yuanshen Qi returned 2 record(s).

NumberTitle
1Effect of the substrate on structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
2Role of temperature on structure and electrical properties of titanium nitride films grown by low pressure plasma enhanced atomic layer deposition