Inductively coupled plasma sources from Plasma ALD, LLC.


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Hisashi Ohba Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hisashi Ohba returned 2 record(s).

NumberTitle
1RT Atomic Layer Deposition of Al2O3 By Using Remote Plasma Excited Water Vapor
2Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen