Inductively coupled plasma sources from Plasma ALD, LLC.


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Adrian Gudí­n Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Adrian Gudí­n returned 1 record(s).

NumberTitle
1Atomic layer deposition of ferroelectric Hf0.5Zr0.5O2 on single-layer, CVD-grown graphene