Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Andrew Li Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Andrew Li returned 1 record(s).

NumberTitle
1Industrially relevant Al2O3 deposition techniques for the surface passivation of Si solar cells