Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Henri Chevrel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Henri Chevrel returned 1 record(s).

NumberTitle
1Plasma-enhanced atomic layer deposition of Co using Co(MeCp)2 precursor