Sung-Soo Yim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sung-Soo Yim returned 3 record(s).

Number	Title
1	Formation of Ru nanocrystals by plasma enhanced atomic layer deposition for nonvolatile memory applications
2	Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application
3	A Bilayer Diffusion Barrier of ALD-Ru/ALD-TaCN for Direct Plating of Cu