Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

R. Falster Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by R. Falster returned 1 record(s).

NumberTitle
1On the equilibrium concentration of boron-oxygen defects in crystalline silicon