Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Jörg Raabe Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jörg Raabe returned 1 record(s).

NumberTitle
1Exploiting atomic layer deposition for fabricating sub-10nm X-ray lenses