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Alexei D. Bouravleuv Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexei D. Bouravleuv returned 2 record(s).

NumberTitle
1Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition
2Surface passivation of GaAs nanowires by the atomic layer deposition of AlN