Kangsik Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kangsik Kim returned 3 record(s).

Number	Title
1	In situ surface cleaning on a Ge substrate using TMA and MgCp₂ for HfO₂-based gate oxides
2	Very high frequency plasma reactant for atomic layer deposition
3	Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition