Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Cedric Huyghebaert Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Cedric Huyghebaert returned 2 record(s).

NumberTitle
1WS2 transistors on 300 mm wafers with BEOL compatibility
2Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides