Jong Hyun Seo Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jong Hyun Seo returned 2 record(s).

Number	Title
1	Properties of plasma-enhanced atomic layer deposited TiC_x films as a diffusion barrier for Cu metallization
2	Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH₃ Plasma as a Reactant