Wei Zeng Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Wei Zeng returned 2 record(s).

Number	Title
1	Optical and electrical properties of Al:WS₂ films prepared by atomic layer deposition and vulcanization
2	Layer-controlled and atomically thin WS₂ films prepared by sulfurization of atomic-layer-deposited WO₃ films