Inductively coupled plasma sources from Plasma ALD, LLC.


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S. Salahuddin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by S. Salahuddin returned 1 record(s).

NumberTitle
1Electrical Characteristics of n, p-In0.53Ga0.47As MOSCAPs With In Situ PEALD-AlN Interfacial Passivation Layer