Inductively coupled plasma sources from Plasma ALD, LLC.


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Damon B. Farmer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Damon B. Farmer returned 2 record(s).

NumberTitle
1Uniform Growth of Sub-5-Nanometer High-κ Dielectrics on MoS2 Using Plasma-Enhanced Atomic Layer Deposition
2Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources